High-Conversion-Efficiency High-Power 266 nm Laser Based on CLBO Crystal

Abstract

CLBO is one of the most promising nonlinear crystals for deep-ultraviolet laser generation because it supports shorter-wavelength conversion with strong engineering value.

At 266 nm, the combination of high output power and high conversion efficiency is particularly important for semiconductor processing, precision micromachining, and ultraviolet spectroscopy.

Compared with many conventional ultraviolet routes, CLBO offers a strong balance between nonlinear performance and high-power potential.

Performance characteristics

The reported 266 nm system is built around domestically available commercial CLBO crystals and demonstrates high conversion efficiency together with high-power deep-ultraviolet output.

This confirms that CLBO remains a leading crystal choice for practical DUV solid-state laser platforms.

The result is especially meaningful for engineering-oriented systems that need reliable ultraviolet throughput rather than laboratory-only proof of concept.

Application value

266 nm CLBO lasers are relevant to wafer processing, ultraviolet inspection, micro-drilling, and scientific instrumentation.

They are also an important route for domesticized high-power DUV laser subsystems.